SK Hynix assembles first High-NA EUV lithography tool for mass production at M16 fab

[Redaktion]

SK Hynix has installed ASML's High-NA EUV system at its M16 fab in South Korea, the first such tool assembled for mass production. The breakthrough enables smaller features, higher density DRAM, and strengthens the company's edge over Samsung and Micron in next-gen memory.

https://www.notebookcheck.net/SK-Hynix-assembles-first-High-NA-EUV-lithography-tool-for-mass-production-at-M16-fab.1104754.0.html