Chinese company Prinano delivers first domestic nanoimprint lithography tool

[Redaktion]

Chinese firm Prinano has shipped its first self-developed PL-SR nanoimprint lithography system, capable of sub-10 nm line widths, to a local customer. Positioned as an alternative to EUV for memory, photonics, and packaging, it marks the first Chinese placement of such a tool and only the second globally after Canon.

https://www.notebookcheck.net/Chinese-company-Prinano-delivers-first-domestic-nanoimprint-lithography-tool.1088382.0.html