Print Page - Chinese scientists develop solid-state DUV laser for semiconductor lithography

Title: Chinese scientists develop solid-state DUV laser for semiconductor lithography
Post by: Redaktion on March 24, 2025, 14:40:54

Chinese scientists develop solid-state 193 nm laser for semiconductor manufacturing, potentially replacing toxic gas-based systems with safer technology—though significant power scaling challenges remain.

https://www.notebookcheck.net/Chinese-scientists-develop-solid-state-DUV-laser-for-semiconductor-lithography.985219.0.html

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